Insolateur masqueur à LED UV
| Vendor | Kloe |
| Catalog name | UV-KUB1 |
| Technical details | 25 mW_cm² @ 365 nm |
| Laboratory | TIPs |
Spin coater + support + pompe à vide
| Vendor | SCS |
| Catalog name | P6808P |
| Technical details | max : 8 step; 9999rpm; acc : 30 s; dwell time : 999s |
| Laboratory | TIPs |
Plasma Cleaner + O2 service pump
| Vendor | Harrick Plasma |
| Catalog name | PDC-002 + PDC-FMG-2 |
| Technical details | Air or O2 plasma; up to 29,6 W; Pressure measurement : 1-1999 mTorr |
| Laboratory | TIPs |
Spin coater + pompe à vide
| Vendor | LOT |
| Laboratory | TIPs |
Lampe UV
| Vendor | Norland |
| Catalog name | Opticure led 200 |
| Technical details | 2.5 w_cm² @ 365nm; 1 mm² LED |
| Laboratory | TIPs |
Aligneuse de Masque
| Vendor | Kloe |
| Catalog name | UV-KUB3 |
| Technical details | 40 mW_cm² @ 365 nm |
| Laboratory | TIPs |
Pousse-seringues (x5) et contrôleurs (x3)
| Vendor | Cetoni |
| Catalog name | Nemesys |
| Technical details | low pressure option 290 N |
| Laboratory | TIPs |
Electrovanne
| Vendor | Fluigent |
| Catalog name | Switchboard |
| Technical details | 20 ms response time |
| Laboratory | TIPs |
Mass Flow Meter (Debitmetre flow unit) (x4)
| Vendor | Fluigent |
| Laboratory | TIPs |
Contrôleur de pression (x5)
| Vendor | Fluigent |
| Laboratory | TIPs |
Spin coater ( materiel non fiable)
| Vendor | LOT Ariel Gruppe |
| Catalog name | SCE-2 |
| Technical details | Controllable ramp, speed by potentiometer |
| Laboratory | TIPs |
Plasma Cleaner Femto
| Vendor | Femto Science Inc |
| Catalog name | CUTE-1MPR |
| Technical details | 20-100kHz, 100W, O2 line |
| Laboratory | TIPs |
UV Light Curing
| Vendor | Dymax (Mavom) |
| Catalog name | BlueWave LED PRIME UVA |
| Technical details | 385 nm, 15W_cm² |
| Laboratory | TIPs |
| Name | Technical Details | Team |
|---|---|---|
| Insolateur masqueur à LED UV, Kloe, UV-KUB1 | 25 mW_cm² @ 365 nm | TIPs |
| Spin coater + support + pompe à vide, SCS, P6808P | max : 8 step; 9999rpm; acc : 30 s; dwell time : 999s | TIPs |
| Plasma Cleaner + O2 service pump, Harrick Plasma, PDC-002 + PDC-FMG-2 | Air or O2 plasma; up to 29,6 W; Pressure measurement : 1-1999 mTorr | TIPs |
| Spin coater + pompe à vide, LOT, | TIPs | |
| Lampe UV, Norland, Opticure led 200 | 2.5 w_cm² @ 365nm; 1 mm² LED | TIPs |
| Aligneuse de Masque, Kloe, UV-KUB3 | 40 mW_cm² @ 365 nm | TIPs |
| Pousse-seringues (x5) et contrôleurs (x3), Cetoni, Nemesys | low pressure option 290 N | TIPs |
| Electrovanne, Fluigent, Switchboard | 20 ms response time | TIPs |
| Mass Flow Meter (Debitmetre flow unit) (x4), Fluigent, | TIPs | |
| Contrôleur de pression (x5), Fluigent, | TIPs | |
| Spin coater ( materiel non fiable), LOT Ariel Gruppe, SCE-2 | Controllable ramp, speed by potentiometer | TIPs |
| Plasma Cleaner Femto, Femto Science Inc, CUTE-1MPR | 20-100kHz, 100W, O2 line | TIPs |
| UV Light Curing, Dymax (Mavom), BlueWave LED PRIME UVA | 385 nm, 15W_cm² | TIPs |